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Proceedings Paper

Accuracy and repeatability results of OMNISCATR: a high-speed high-resolution three-dimensional scatterometer
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Paper Abstract

OMNISCATR 1000 is a second generation of a new generation of high resolution three dimensional scatterometers. The instrument can acquire 200,000 three dimensional scatter data points with a dynamic range of 108. A description of OMNISCATR 1000 and its capabilities is presented. Data is also presented showing that the instrument's high speed data acquisition system has a measurement repeatability of 2.5%.

Paper Details

Date Published: 7 October 1994
PDF: 9 pages
Proc. SPIE 2260, Stray Radiation in Optical Systems III, (7 October 1994); doi: 10.1117/12.189205
Show Author Affiliations
Raymond J. Castonguay, Breault Research Organization, Inc. (United States)
Terry D. Ferguson, Santa Barbara Research Ctr. (United States)

Published in SPIE Proceedings Vol. 2260:
Stray Radiation in Optical Systems III
Robert P. Breault, Editor(s)

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