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Proceedings Paper

Modification of sol-gel coatings by ion implantation
Author(s): Hiroshi Hirashima; Kenji Adachi; Hiroaki Imai
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Paper Abstract

In order to densify and to improve the physical properties, TiO2 sol-gel films, about 100 nm in thickness, on silica glass or silicon wafer were implanted with Ar+ or B+ ions. The refractive index of the as-dried films increased and the IR absorption band of OH disappeared after Ar+ implantation. Dehydration and densification of sol-gel films were enhanced by Ar+ implantation. On the other hand, the refractive index and the thickness of the films hardly changed by B+ implantation. However, IR absorption bands attributed to B-O bond were observed after B+ implantation. This suggests that sol-gel films could be chemically modified by ion implantation with reactive ion species.

Paper Details

Date Published: 13 October 1994
PDF: 8 pages
Proc. SPIE 2288, Sol-Gel Optics III, (13 October 1994); doi: 10.1117/12.188968
Show Author Affiliations
Hiroshi Hirashima, Keio Univ. (Japan)
Kenji Adachi, Keio Univ. (Japan)
Hiroaki Imai, Keio Univ. (Japan)

Published in SPIE Proceedings Vol. 2288:
Sol-Gel Optics III
John D. Mackenzie, Editor(s)

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