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Proceedings Paper

Performance of uncooled semiconductor film bolometer infrared detectors
Author(s): Mark H. Unewisse; Stephen J. Passmore; Kevin Charles Liddiard; Rodney J. Watson
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Paper Abstract

This paper describes a model for predicting the behavior of micro-machined thermal isolation structures that are employed in uncooled infrared detectors developed at the Defence Science and Technology Organisation (DSTO). The model forms the basis for calculations predicting the performance of semiconductor film microbolometers as infrared detectors. Performance predictions for a particular detector design are shown to be in good agreement with measured values. The effects of non-ohmic contacts and materials deposition techniques on noise, and hence on detector performance, are also discussed.

Paper Details

Date Published: 17 October 1994
PDF: 10 pages
Proc. SPIE 2269, Infrared Technology XX, (17 October 1994); doi: 10.1117/12.188679
Show Author Affiliations
Mark H. Unewisse, Defence Science and Technology Organisation (Australia)
Stephen J. Passmore, Defence Science and Technology Organisation (Australia)
Kevin Charles Liddiard, Defence Science and Technology Organisation (Australia)
Rodney J. Watson, Defence Science and Technology Organisation (Australia)


Published in SPIE Proceedings Vol. 2269:
Infrared Technology XX
Bjorn F. Andresen, Editor(s)

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