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Proceedings Paper

Fully automated angle resolved scatterometer
Author(s): Jakob Neubert; Thomas Seifert; Norbert Czarnetzki; Thomas Weigel
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Paper Abstract

The ARS-scatterometer at the IOF Jena which has been designed and built in cooperation with the Carl Zeiss JENA GmbH is capable of performing accurate measurements of the BRDF over a range of approximately eleven orders of magnitude (from 105 to 10-6 sr-1) in BRDF. These measurements can be carried out for surfaces made of any dielectric, metallic or semiconductor material. A He-Ne-laser is used in conjunction with a mirror beam focusing optics. The eight motorized degrees of freedom of the instruments are computer controlled and interfaced to the user by a sophisticated software running under MicroSoft Windows. It is shown, that the scatterometer is sensitive to a rms-roughness better than 1 nm.

Paper Details

Date Published: 30 September 1994
PDF: 10 pages
Proc. SPIE 2210, Space Optics 1994: Space Instrumentation and Spacecraft Optics, (30 September 1994); doi: 10.1117/12.188112
Show Author Affiliations
Jakob Neubert, Fraunhofer Institution for Applied Optics and Precision Engineering (Germany)
Thomas Seifert, Fraunhofer Institution for Applied Optics and Precision Engineering (Germany)
Norbert Czarnetzki, Carl Zeiss (Germany)
Thomas Weigel, European Space Agency/ESTEC (Netherlands)


Published in SPIE Proceedings Vol. 2210:
Space Optics 1994: Space Instrumentation and Spacecraft Optics
Thierry M. Dewandre; Joachim J. Schulte-in-den-Baeumen; Emmanuel Sein, Editor(s)

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