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Proceedings Paper

Principal surface approach as means of precise RMS-roughness estimation in noncontact profilometry
Author(s): Hendrik Rothe; Angela Duparre; Andre Kasper
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Paper Abstract

A commonly used estimator for the microtopography of a surface is its RMS-roughness. Raw surface profile data may contain trending components. Therefore they should be subjected to a detrending procedure before estimating the RMS-value. This procedure is limited in most cases to the removal of piston, slope and curvature. Consequently, undesired artifacts may arise, which negatively influence the precision of RMS-roughness estimation. In scanning surface metrology, the principal surface computed by using eigenvalues and eigenvectors of the covariance matrix of the surface data under consideration can be used for a robust and precise multivariate estimation of RMS-roughness.

Paper Details

Date Published: 30 September 1994
PDF: 12 pages
Proc. SPIE 2263, Current Developments in Optical Design and Optical Engineering IV, (30 September 1994); doi: 10.1117/12.188001
Show Author Affiliations
Hendrik Rothe, Federal Armed Forces Univ. Hamburg (Germany)
Angela Duparre, Fraunhofer Institute for Applied Optics and Precision Mechanics (Germany)
Andre Kasper, Federal Armed Forces Univ. Hamburg (Germany)

Published in SPIE Proceedings Vol. 2263:
Current Developments in Optical Design and Optical Engineering IV
Robert E. Fischer; Warren J. Smith, Editor(s)

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