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Proceedings Paper

Integrated ion beam milling and coating for precision optical fabrication
Author(s): Kathy W. Hylton; Charles M. Egert; Kathy A. Thomas
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Paper Abstract

An ion beam milling system, used for precision optical fabrication, was modified to easily allow deposition of thin films onto the same optics within a single vacuum operation. A series of coating experiments was performed to assess this approach to integrated ion milling and optical coating. Attempts were made to maximize the deposition rates while maintaining a narrow distribution of coating material to provide the optimum total process time. A series of shaped sputter targets was found to maintain high deposition rates similar to those of a flat target but without having the desired effect of narrowing the material distribution. Apertured shields produced narrow material distributions but at the expense of significantly lowering the deposition rates. Despite these limitations, analysis shows that thin optical films can be produced in a reasonable time by this approach.

Paper Details

Date Published: 30 September 1994
PDF: 9 pages
Proc. SPIE 2263, Current Developments in Optical Design and Optical Engineering IV, (30 September 1994); doi: 10.1117/12.187999
Show Author Affiliations
Kathy W. Hylton, Oak Ridge National Lab. (United States)
Charles M. Egert, Oak Ridge National Lab. (United States)
Kathy A. Thomas, Oak Ridge National Lab. (United States)


Published in SPIE Proceedings Vol. 2263:
Current Developments in Optical Design and Optical Engineering IV
Robert E. Fischer; Warren J. Smith, Editor(s)

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