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Proceedings Paper

Optical-quality high-growth-rate, arc-jet CVD diamond
Author(s): Tom A. McKenna; James T. Hoggins; John M. Trombetta; Paul Klocek; Charles E. Vaughan
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Paper Abstract

Through a joint effort between Texas Instruments (TI) and Olin Aerospace Company (OAC), a supersonic hydrogen arc jet for high-growth-rate chemical vapor deposition (CVD) of thick layers of optical quality diamond has been developed for flat substrates as large as 8 inches in diameter and for hemispherical domes measuring 2.5 inches in diameter. An overview of this deposition system is presented, along with optical and structural analysis of the subsequently deposited material. Efforts to monitor the plasma chemistry, along with in-depth computer modeling of the gas phase chemistry and hydrodynamics of this supersonic jet, in order to produce a higher-growth-rate process while maintaining optical quality, are discussed. The current status of the overall performance of this deposition system and the resultant material are presented in relation to the requirements for high-speed-missile domes and windows.

Paper Details

Date Published: 28 September 1994
PDF: 14 pages
Proc. SPIE 2286, Window and Dome Technologies and Materials IV, (28 September 1994); doi: 10.1117/12.187338
Show Author Affiliations
Tom A. McKenna, Texas Instruments Inc. (United States)
James T. Hoggins, Texas Instruments Inc. (United States)
John M. Trombetta, Texas Instruments Inc. (United States)
Paul Klocek, Texas Instruments Inc. (United States)
Charles E. Vaughan, Olin Aerospace Co. (United States)

Published in SPIE Proceedings Vol. 2286:
Window and Dome Technologies and Materials IV
Paul Klocek, Editor(s)

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