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Proceedings Paper

On-line SPC-based trigger for control action
Author(s): R. Russell Rhinehart
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Paper Abstract

A procedure is developed which uses SPC concepts to automatically trigger when control action is justified. The conventional concepts of CUSUM and variance are reformulated for computational simplicity. Including initialization, the algorithm is shown to require 18 lines of executable FORTRAN code. The procedure can be used, for instance, to supervise changes in etch reactor conditions based on successive end run analysis.

Paper Details

Date Published: 16 September 1994
PDF: 9 pages
Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); doi: 10.1117/12.186799
Show Author Affiliations
R. Russell Rhinehart, Texas Tech Univ. (United States)


Published in SPIE Proceedings Vol. 2336:
Manufacturing Process Control for Microelectronic Devices and Circuits
Anant G. Sabnis, Editor(s)

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