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Proceedings Paper

Intellectual information system of precedent search and expert diagnostics of technological malfunctions in very large scale integration (VLSI) manufacturing
Author(s): Peter A. Arutyunov; Mikhail G. Kuznetsov; Elena G. Yermakova
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Paper Abstract

The field of Information Intellectual System (IIS) application in technology spreads over solving problems, that cannot be easily formalized and that are connected with the diagnostics and quality control of VLSI. One of the main tasks of IIS in the technology of Microelectronics is the precedent search. Another task no less serious is to mathematically process technological experience using information coded array. The purpose of it is, firstly, to establish interrelation between symptomatic and failures and secondly, to choose an optimal plan of rehabilitation of the technological process and the crystal. The paper describes the basic concepts and principles of software and mathematical software development of computer system of expert diagnostics of technological malfunctions in VLSI manufacturing. The system includes: data base (DB), knowledge base (KB) and subsystems (of precedent search, expert diagnostics and consultations on rehabilitation). DB and KB contain information of defects, their characteristics and failure mechanisms for MOS and bipolar VLSI, taken from scientific publications. The research prototype of this system was realized on IBM Pc using Multiwindow Interface CLIPPER.

Paper Details

Date Published: 16 September 1994
PDF: 13 pages
Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); doi: 10.1117/12.186793
Show Author Affiliations
Peter A. Arutyunov, Moscow State Institute of Electronics and Mathematics (Russia)
Mikhail G. Kuznetsov, Moscow State Institute of Electronics (Russia)
Elena G. Yermakova, Moscow State Institute of Electronics and Mathematics (Russia)


Published in SPIE Proceedings Vol. 2336:
Manufacturing Process Control for Microelectronic Devices and Circuits
Anant G. Sabnis, Editor(s)

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