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Proceedings Paper

Submodule for the laser vacuum projection lithography
Author(s): Eduard I. Tochitsky; A. V. Baranov; Victor V. Boksha; Vyjacheslav E. Obukhov; Anatoly I. Sharendo; Y. I. Tochitsky; Victor Adamovich Azarko; V. Lopatko
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Paper Abstract

The present paper gives the results of investigations of the process of the laser vacuum projection lithography (LVPL) and design of a laser projection stepper, ensuring practical implementation of the proposed process. The LVPL principles, fields of application are discussed, the LVPL EM-5094 submodule specifications are given and its test results are provided.

Paper Details

Date Published: 16 September 1994
PDF: 6 pages
Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); doi: 10.1117/12.186792
Show Author Affiliations
Eduard I. Tochitsky, PLASMOTEG Engineering Ctr. (Belarus)
A. V. Baranov, S. I. Vavilov State Optical Institute (Belarus)
Victor V. Boksha, PLASMOTEG Engineering Ctr. (Belarus)
Vyjacheslav E. Obukhov, PLASMOTEG Engineering Ctr. (Belarus)
Anatoly I. Sharendo, PLASMOTEG Engineering Ctr. (Belarus)
Y. I. Tochitsky, State Scientific and Production Enterprise (Belarus)
Victor Adamovich Azarko, Institute of Physical-Organic Chemistry (Belarus)
V. Lopatko, Belorussian Interbranch Enterprise (Belarus)


Published in SPIE Proceedings Vol. 2336:
Manufacturing Process Control for Microelectronic Devices and Circuits
Anant G. Sabnis, Editor(s)

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