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Proceedings Paper

Integrated manufacturing approach to attain benchmark team performance
Author(s): Shau-Ron Chen; Andrew Nguyen; Hussein Naguib
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Paper Abstract

A Self-Directed Work Team (SDWT) was developed to transfer a polyimide process module from the research laboratory to our wafer fab facility for applications in IC specialty devices. The SDWT implemented processes and tools based on the integration of five manufacturing strategies for continuous improvement. These were: Leadership Through Quality (LTQ), Total Productive Maintenance (TMP), Cycle Time Management (CTM), Activity-Based Costing (ABC), and Total Employee Involvement (TEI). Utilizing these management techniques simultaneously, the team achieved six sigma control of all critical parameters, increased Overall Equipment Effectiveness (OEE) from 20% to 90%, reduced cycle time by 95%, cut polyimide manufacturing cost by 70%, and improved its overall team member skill level by 33%.

Paper Details

Date Published: 16 September 1994
PDF: 12 pages
Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); doi: 10.1117/12.186789
Show Author Affiliations
Shau-Ron Chen, Xerox Microelectronics Ctr. (United States)
Andrew Nguyen, Xerox Microelectronics Ctr. (United States)
Hussein Naguib, Xerox Microelectronics Ctr. (United States)


Published in SPIE Proceedings Vol. 2336:
Manufacturing Process Control for Microelectronic Devices and Circuits
Anant G. Sabnis, Editor(s)

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