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Proceedings Paper

MEMaterial: a new microelectronic material deposition tool
Author(s): Fariborz Maseeh
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Paper Abstract

A new material simulation tool is developed which shows physical, thermal, mechanical, electrical and optical properties of thin films as a function of their manufacturing processes. The software uses a unique multidimensional estimation routine developed specifically for properties that vary with several parameters simultaneously. Substantial testing of the estimation software shows reliability of predictions in the range of 2 to 20 percent of the measured property values.

Paper Details

Date Published: 16 September 1994
PDF: 6 pages
Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); doi: 10.1117/12.186783
Show Author Affiliations
Fariborz Maseeh, IntelliSense Corp. (United States)

Published in SPIE Proceedings Vol. 2336:
Manufacturing Process Control for Microelectronic Devices and Circuits
Anant G. Sabnis, Editor(s)

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