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Proceedings Paper

Noncontact thickness measurement of dielectric coatings using millimeter waves
Author(s): Mark T. Lusk; Kaladhar Radhakrishnan; Hsiu C. Han; Edward S. Mansueto
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Paper Abstract

Millimeter wave reflectometry offers a noncontact means of measuring the thicknesses of individual layers within multi-layer dielectric coatings on metallic substrates. Complex reflection coefficients of both TM and TE/TM waves incident on coated materials are measured over a range of frequencies and grazing angles of incidence. The sensitivity of the apparatus is such that single-layer coatings differing by 0.2 microns can be distinguished.

Paper Details

Date Published: 14 September 1994
PDF: 10 pages
Proc. SPIE 2275, Advanced Microwave and Millimeter-Wave Detectors, (14 September 1994); doi: 10.1117/12.186704
Show Author Affiliations
Mark T. Lusk, Iowa State Univ. (United States)
Kaladhar Radhakrishnan, Iowa State Univ. (United States)
Hsiu C. Han, Iowa State Univ. (United States)
Edward S. Mansueto, Iowa State Univ. (United States)

Published in SPIE Proceedings Vol. 2275:
Advanced Microwave and Millimeter-Wave Detectors
Satish S. Udpa; Hsiu C. Han, Editor(s)

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