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Proceedings Paper

Optical investigations of thin hydrogenated carbon (C:H) films
Author(s): Valerie A. Ligachov; Anatolyi I. Popov; Sergei N. Stuokach
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Paper Abstract

I 'S well Imown rac t that propert ies or bydrogenat ed carbon (C : H ) rums are strongly influenced by deposit ion cond.i t ions or the rums [1]. This allow us use C:H rums ror d.irrerent applica— t ions , but we must understand how composition and propert ies or the rums are corinec t ed. with them clepos it ion conch t ions . In the work we will consider results or optical investigation or 0:11 rilms, prepared by RF sputtering, and try to explain results ob tained on the base or model ror "graphite—like" components con densation regimes on surrace or growing rum.

Paper Details

Date Published: 14 September 1994
PDF: 5 pages
Proc. SPIE 2337, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing, (14 September 1994); doi: 10.1117/12.186636
Show Author Affiliations
Valerie A. Ligachov, Moscow Power Engineering Institute (Russia)
Anatolyi I. Popov, Moscow Power Engineering Institute (Russia)
Sergei N. Stuokach, Moscow Power Engineering Institute (Russia)

Published in SPIE Proceedings Vol. 2337:
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing
Jagdish P. Mathur; John K. Lowell; Ray T. Chen, Editor(s)

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