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Proceedings Paper

Submicron-size laser treatment of the solid state surface
Author(s): Vasily V. Valyavko; Vladimir P. Osipov
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Paper Abstract

A method of producing submicron (hundreds of nanometers and less) periodical structures on the solid state surface by means of one-pulse laser radiation treatment is developed. The resulting structures look like a system of narrow parallel equidistant grooves. Before a treatment the surface may be covered by one of several thin layers to be destroyed. It is possible to obtain the grooves, a width of which is from 10 to 100 times less than the wavelength of used laser radiation. It is possible to vary the distance between the grooves in a wide range. When a carbon dioxide TEA-laser (0.2 joule-energy, 10.6 micron-wavelength) was used for the treatment of samples (800 angstrom-aluminum film evaporated on the optical glass plates) periodical structures looking like a system of narrow parallel equidistant grooves were produced on an area with a diameter of about 2 mm. The width of the grooves was less than 0.3 micron and a distance between the grooves varied from 7 to 500 microns. Therefore this method has enabled us to obtain grooves with a width about 30 times less than the wavelength of the laser radiation used.

Paper Details

Date Published: 9 September 1994
PDF: 4 pages
Proc. SPIE 2335, Microelectronics Technology and Process Integration, (9 September 1994); doi: 10.1117/12.186068
Show Author Affiliations
Vasily V. Valyavko, Institute of Physics (Belarus)
Vladimir P. Osipov, Institute of Physics (Belarus)


Published in SPIE Proceedings Vol. 2335:
Microelectronics Technology and Process Integration
Fusen E. Chen; Shyam P. Murarka, Editor(s)

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