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Proceedings Paper

Three-dimensional laser micromachining
Author(s): Lijun Li
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Paper Abstract

Some basic aspects involved in laser micro-machining, like material removal, surface integrity, and dimensional precision, are discussed. Higher surface integrity and lower roughness of the order of submicron can be obtained when both ceramics and metals are machined by an acoustic-optical Q-switched pulse YAG laser. Dimensional precision can be improved by using a focal system with shorter focal depth and by lowering the power density at the focal spot.

Paper Details

Date Published: 9 September 1994
PDF: 9 pages
Proc. SPIE 2335, Microelectronics Technology and Process Integration, (9 September 1994); doi: 10.1117/12.186058
Show Author Affiliations
Lijun Li, Hunan Univ. (China)


Published in SPIE Proceedings Vol. 2335:
Microelectronics Technology and Process Integration
Fusen E. Chen; Shyam P. Murarka, Editor(s)

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