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Proceedings Paper

Preparation and properties of SnO2 films doped with phosphorous and phosphorous plus fluorine
Author(s): Kroum M. Kolentsov; A. S. Rachkova; Lilyana S. Yourukova; Vesela Pamukchieva
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Paper Abstract

The suitable layer-building solutions containing tin and phosphorus or tin and phosphorus plus fluorine compounds were prepared. Simple spray pyrolysis technique for obtaining thin SnO2:P or SnO2:P, F films on glass or quartz substrates is used. The effect of different parameters such as dopant concentration, substrate temperature and carrier gas flow-rate on film properties is presented. some physical, electrical and optical characteristics of the prepared thin SnO2:P and SnO2:P, F films is discussed.

Paper Details

Date Published: 7 September 1994
PDF: 6 pages
Proc. SPIE 2262, Optical Thin Films IV: New Developments, (7 September 1994); doi: 10.1117/12.185802
Show Author Affiliations
Kroum M. Kolentsov, Institute of Solid State Physics (Bulgaria)
A. S. Rachkova, Institute of Solid State Physics (Bulgaria)
Lilyana S. Yourukova, Institute of Solid State Physics (Bulgaria)
Vesela Pamukchieva, Institute of Solid State Physics (Bulgaria)


Published in SPIE Proceedings Vol. 2262:
Optical Thin Films IV: New Developments
James D. Rancourt, Editor(s)

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