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Proceedings Paper

New-type active vibration isolation system with laser interferometer and piezoelectric displacement transducer
Author(s): Boyin Lu; Meirong Zhao
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Paper Abstract

A new-type active vibration isolation system is developed for ultra-precision measuring system. It is composed of three sets of 3D Laser interferometer transducer and six groups of piezoelectric displacement executor to constrain six degrees of space movement and to realize real-time compensation of vibration. The active vibration isolation system can effectively eliminate low-frequency vibrations. Combined with passive vibration isolation system, it gives better vibration isolation effect.

Paper Details

Date Published: 8 September 1994
PDF: 15 pages
Proc. SPIE 2358, First International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (8 September 1994); doi: 10.1117/12.185316
Show Author Affiliations
Boyin Lu, Tianjin Univ. (China)
Meirong Zhao, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 2358:
First International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)

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