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Proceedings Paper

Precision-surfaces measurement insensitive to vertical vibration: a proposition for integrated holographic optical probe method
Author(s): Bao Hua Zhuang; Ji-Hua Zhang; Wenwei Zhang
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Paper Abstract

Precision surfaces are needed in many fields. Usually they should be finished with nm order surface roughness as well as with a highly form accuracy. In order to know the textures of the machining surface and diagnose the machining process, the measurement should be carried out in the condition which is usually influenced by vibration disturbances. The purpose of this paper is to describe a new precision surface profiling probe - Integrated Holographic Optical Probe (IHOP) for precision surfaces profile measurement which is nearly insensitive to vertical vibrations. IHOP is an integrated sensor which serves a four sensors. It can be used in the differential mode to eliminate or to minimize errors caused by vibrations. In this first report, the computer simulation and experimental results are obtained. They show the sensitivity with the order of nanometers for this probe. The complexity and the size of the probe can be significantly reduced.

Paper Details

Date Published: 8 September 1994
PDF: 6 pages
Proc. SPIE 2358, First International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (8 September 1994); doi: 10.1117/12.185313
Show Author Affiliations
Bao Hua Zhuang, Tianjin Univ. (China)
Ji-Hua Zhang, Tianjin Univ. (China)
Wenwei Zhang, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 2358:
First International Conference on Vibration Measurements by Laser Techniques: Advances and Applications

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