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Proceedings Paper

Pulsed laser technology in microelectronics
Author(s): Vladimir Michailovi Koleshko; A. V. Gulai
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Paper Abstract

Laser processing methods have been widely used in microelectronics technology due to the following advantages: the zone of laser action can be decreased by focusing the beam into a small spot non-contact treatment eliminates undesirable introduction of impurities into laser-affected zone; the control of the energetic parameters and the spatial position of the treatment zone is relatively simple; laser treatment process is compatible with automatic control based on microprocessor systems. In this connection, the problem of laser radiation-substance interaction arises as well as the need for developing the technological processes ensuring high efficiency and quality of production, improvement of very large-scale integration (VLSI) parameters, and making products with unique characteristics.

Paper Details

Date Published: 1 June 1990
PDF: 10 pages
Proc. SPIE 1225, High-Power Gas Lasers, (1 June 1990); doi: 10.1117/12.18489
Show Author Affiliations
Vladimir Michailovi Koleshko, Institute of Physico-Organic Chemistry (Belarus)
A. V. Gulai, Institute of Physico-Organic Chemistry (Belarus)

Published in SPIE Proceedings Vol. 1225:
High-Power Gas Lasers
Petras V. Avizonis; Charles Freed; Jin J. Kim; Frank K. Tittel, Editor(s)

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