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Proceedings Paper

Highest-power excimer lasers
Author(s): Elmar Mueller-Horsche; Peter Oesterlin; Dirk Basting
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Paper Abstract

A historical overview over the development of excimer lasers into the multi-100 Watt range is given. Special emphasis is on efforts in Japan and Europe concerning excimer lasers with an average power exceeding 1 kilowatt. The overview includes a discussion of the different excitation mechanisms.

Paper Details

Date Published: 1 June 1990
PDF: 7 pages
Proc. SPIE 1225, High-Power Gas Lasers, (1 June 1990); doi: 10.1117/12.18480
Show Author Affiliations
Elmar Mueller-Horsche, Lambda Physik GmbH (Germany)
Peter Oesterlin, Lambda Physik GmbH (Germany)
Dirk Basting, Lambda Physik GmbH (Germany)

Published in SPIE Proceedings Vol. 1225:
High-Power Gas Lasers
Petras V. Avizonis; Charles Freed; Jin J. Kim; Frank K. Tittel, Editor(s)

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