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Proceedings Paper

Dynamics of excimer laser ablation of thin tungsten films studied by fast photography
Author(s): Zsolt Toth; Bela Hopp; Zoltan Kantor; Ferenc Ignacz; Tamas Szoerenyi; Zsolt Bor
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Paper Abstract

The time evolution of ablation and material transport during ArF excimer laser induced blow off of tungsten films from glass substrates is studied by fast photography using delayed dye laser pulses. The analysis of experimental results combined with heat flow calculations provides evidence that tungsten removal in the solid phase is the dominant mechanism in the 40 - 200 mJ/cm2 fluence domain, while partially inhomogeneous melting is observed between 200 and 800 mJ/cm2. In this fluence range, solid fragments and a halo consisting of molten droplets are observed indicating spatial separation of the two phases. The molten phase advances faster, forming a protective mist in front of the solid piece(s). At yet higher fluences (800 - 1000 mJ/cm2), a well separated solid phase could be recorded under the halo although model calculations suggest full vaporization of the layer. This unexpected phenomenon is explained by the optical shielding effect of the halo.

Paper Details

Date Published: 7 September 1994
PDF: 8 pages
Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); doi: 10.1117/12.184786
Show Author Affiliations
Zsolt Toth, Research Group on Laser Physics (Hungary)
Bela Hopp, Research Group on Laser Physics (Hungary)
Zoltan Kantor, Research Group on Laser Physics (Hungary)
Ferenc Ignacz, Research Group on Laser Physics (Hungary)
Tamas Szoerenyi, Research Group on Laser Physics (Hungary)
Zsolt Bor, Research Group on Laser Physics (Hungary)

Published in SPIE Proceedings Vol. 2207:
Laser Materials Processing: Industrial and Microelectronics Applications
Eckhard Beyer; Maichi Cantello; Aldo V. La Rocca; Lucien Diego Laude; Flemming O. Olsen; Gerd Sepold, Editor(s)

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