Share Email Print
cover

Proceedings Paper

Laser synthesis of Si-Mo-C-O polymer for membrane modification
Author(s): Rodica Alexandrescu; Dan C. Dumitras; Ion G. Morjan; Letitia Voicu
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The interaction of CO2 laser radiation with mixtures of silane and molybdenum hexacarbonyl (vapor) results in solid Si/C/O/Mo material and various gaseous compounds (mainly CO). The XPS, SEM and IR spectral analysis of the deposit pointed out an organosilicon polymer structure, with a composition that is strongly affected by SiH4 partial concentration. Possible routes involved in the SiH4-photosensitized decomposition of Mo(CO)6 are discussed. The laser technique can serve as an efficient method for creating metal-modified organosilicon polymers for membrane modification.

Paper Details

Date Published: 7 September 1994
PDF: 10 pages
Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); doi: 10.1117/12.184785
Show Author Affiliations
Rodica Alexandrescu, Institute of Atomic Physics (Romania)
Dan C. Dumitras, Institute of Atomic Physics (Romania)
Ion G. Morjan, Institute of Atomic Physics (Romania)
Letitia Voicu, Institute of Atomic Physics (Romania)


Published in SPIE Proceedings Vol. 2207:
Laser Materials Processing: Industrial and Microelectronics Applications

© SPIE. Terms of Use
Back to Top