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Proceedings Paper

Excimer-induced alumina surface restructuring
Author(s): Konstantin Kolev; Lucien Diego Laude; Michel Brunel
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Paper Abstract

Irradiation of sintered Al2O3 plates has been performed using an excimer laser ((lambda) equals 248 nm) and the resulting structural transformation occurring at and near the surface of the plates has been characterized. Low-angle X-ray diffraction reveals a sequence of surface structural modifications which are correlated with the actual energy injection into the material (laser fluence and number of pulses) and the occurrence of very large energy gradient between surface and bulk. At low fluence, surface roughness is increased without any evolution of the initial (alpha) -alumina phase of the materia. Increasing the laser power density results in (gamma) -alumina formation near and at the surface of the plates.

Paper Details

Date Published: 7 September 1994
PDF: 8 pages
Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); doi: 10.1117/12.184773
Show Author Affiliations
Konstantin Kolev, Univ. of Mons (Belgium)
Lucien Diego Laude, Univ. of Mons (Belgium)
Michel Brunel, Lab. of Crystallography (France)

Published in SPIE Proceedings Vol. 2207:
Laser Materials Processing: Industrial and Microelectronics Applications
Eckhard Beyer; Maichi Cantello; Aldo V. La Rocca; Lucien Diego Laude; Flemming O. Olsen; Gerd Sepold, Editor(s)

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