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Proceedings Paper

Unusual features of laser ablation of supported thin films
Author(s): Tamas Szoerenyi; Zoltan Kantor; Lucien Diego Laude
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Paper Abstract

Laser ablation of layer structures made of optically and thermally dissimilar materials is markedly different from ablation of homogeneous bulk materials. In the case of supported thin films the ablation characteristics are influenced by the variation of the material properties at the interface. This concept is highlighted by comparing experimental and thermal calculation data on pulsed laser ablation of metal, tin oxide and indium-tin oxide films from glass support to those of characterizing bulk ablation.

Paper Details

Date Published: 7 September 1994
PDF: 8 pages
Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); doi: 10.1117/12.184767
Show Author Affiliations
Tamas Szoerenyi, Univ. de Mons (Belgium)
Zoltan Kantor, Research Group on Laser Physics (Hungary)
Lucien Diego Laude, Univ. of Mons (Belgium)


Published in SPIE Proceedings Vol. 2207:
Laser Materials Processing: Industrial and Microelectronics Applications
Eckhard Beyer; Maichi Cantello; Aldo V. La Rocca; Lucien Diego Laude; Flemming O. Olsen; Gerd Sepold, Editor(s)

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