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Proceedings Paper

Spatially and temporally resolved study of laser induced absorption waves produced by a 5 us/1J TE-CO2 laser
Author(s): Peter G. Bickel; H. Arenz; Jens Christiansen; E. Eberl; Michael Kauf
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Paper Abstract

The phenomenon of laser supported absorption (LSA) of CO2 laser radiation is investigated with spatially and temporally resolved plasma spectroscopy in Argon as ambient gas at pressures of 1 - 105 Pa. A TE-CO2 laser with a gas mixture of CO2/N2/He equals 1/4/4 at a total pressure of half an atmosphere is used. The pulselength of the TE- CO2 laser is about 6 microsecond(s) at a mean power of some 100 kW. LSA-phenomena and material ablation processes are compared with that of a conventional TEA-CO2 short pulse laser. It could be shown that longer pulses of less mean power make material ablation more efficient if the absorption wave becomes transparent within the pulse time of the laser. Maximum electron density of 2.5 (DOT) 1017 and a temperature of 3 eV were measured 1.5 microsecond(s) after the beginning of the irradiation for an expanding aluminum plasma into vacuum.

Paper Details

Date Published: 7 September 1994
PDF: 12 pages
Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); doi: 10.1117/12.184756
Show Author Affiliations
Peter G. Bickel, Univ. Erlangen-Nuernberg (Germany)
H. Arenz, Univ. Erlangen-Nuernberg (Germany)
Jens Christiansen, Univ. Erlangen-Nuernberg (Germany)
E. Eberl, Univ. Erlangen-Nuernberg (Germany)
Michael Kauf, Univ. Erlangen-Nuernberg (Germany)

Published in SPIE Proceedings Vol. 2207:
Laser Materials Processing: Industrial and Microelectronics Applications
Eckhard Beyer; Maichi Cantello; Aldo V. La Rocca; Lucien Diego Laude; Flemming O. Olsen; Gerd Sepold, Editor(s)

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