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Proceedings Paper

Universal code on modeling of laser-assisted surface processes
Author(s): O. B. Popovicheva; A. M. Popov; T. V. Rakhimova; E. A. Volkova
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Paper Abstract

The computer package is presented for modelling of laser influence on the surface in wide range of laser radiation parameters and materials properties. The more extending application of this code is the calculation of 2D thermal field in multilayer structures under the action of moving laser beam. The materials (metals, semiconductors and dielectrics) with different heat conducting properties can be applied for modelling of the structures. The code works well on the curve surface of the structures (deposits or holes). The fundamental dynamics and kinetics of several laser processes have been investigated in some details using this code. The photochemical laser-induced etching in a Cl2 atmosphere has been investigated. The calculations of 2D differential equations for Cl atoms concentrations produced by gas-phase photodissociation and the photoelectrons generated within Si surface were conducted using our package. The reaction probability was obtained for different laser parameters. On its base we could simulate the depth and feature of etched holes. The method of micropatterning has been suggested. A pyrolitic process of deposition of a metal film on the SiO2 surface has been considered. The temperature profiles inside of W-SiO2 structures were calculated. It has been shown that the heating of existing metallization layer is the source of warming up of the SiO2 substrate following the further deposition of metal film. The metallization layer depth have been obtained at pyrolysis of W(CO)6.

Paper Details

Date Published: 7 September 1994
PDF: 7 pages
Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); doi: 10.1117/12.184754
Show Author Affiliations
O. B. Popovicheva, Moscow State Univ. (Russia)
A. M. Popov, Moscow State Univ. (Russia)
T. V. Rakhimova, Moscow State Univ. (Russia)
E. A. Volkova, Moscow State Univ. (Russia)

Published in SPIE Proceedings Vol. 2207:
Laser Materials Processing: Industrial and Microelectronics Applications
Eckhard Beyer; Maichi Cantello; Aldo V. La Rocca; Lucien Diego Laude; Flemming O. Olsen; Gerd Sepold, Editor(s)

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