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Proceedings Paper

Effect of gas composition and purity on excimer laser operation
Author(s): J. Gabzdyl; I. J. Stares; D. Yates; Michael R. Osborne; Michael A. O'Key
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Paper Abstract

This paper reports a systematic evaluation of the effects of a wide range of gaseous contaminants introduced in the lasing gas on initial laser power and on gas fill lifetimes. The impurities studied and their relative concentrations were chosen on the basis of the probability of their occurrence in the lasing gases. These were assessed individually and also in common combinations, such as N2/O2 simulating an atmospheric leak. Investigations into using novel buffer gas mixtures have shown that increases in operating efficiencies can be achieved. This has been correlated with lasing gas analysis, which has revealed that the rate of internal impurity generation is dependent on the buffer gas composition.

Paper Details

Date Published: 16 August 1994
PDF: 7 pages
Proc. SPIE 2206, High-Power Gas and Solid State Lasers, (16 August 1994); doi: 10.1117/12.184634
Show Author Affiliations
J. Gabzdyl, BOC Limited (United Kingdom)
I. J. Stares, BOC Limited (United Kingdom)
D. Yates, BOC Limited (United Kingdom)
Michael R. Osborne, AEA Technology (United Kingdom)
Michael A. O'Key, AEA Technology (United Kingdom)

Published in SPIE Proceedings Vol. 2206:
High-Power Gas and Solid State Lasers
Markus Bohrer; Tommaso Letardi; Dieter Schuoecker; Horst Weber, Editor(s)

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