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Proceedings Paper

Automated control of industrial-scale excimer lasers
Author(s): Allan D. Boardman; Elizabeth M. Hodgson; M. B. Richardson; A. J. Spence; A. C. Wilson
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Paper Abstract

This paper describes the design, development, and construction of an automated control system for high average power excimer lasers working in an industrial environment. The control system is based on a distributed network of transputers, each dealing with its own area of responsibility. This modular approach was chosen to provide maximum flexibility, allowing the control system to be optimized for particular lasers or special requirements. The development of monitoring and actuating equipment suitable for the unusual demands of an excimer laser is also an essential part of the overall project. Some of the monitoring equipment used is standard, while some has been designed and built at Salford. In particular, a 100 MHz bandwidth optical fiber current sensor has been developed to measure the discharge current. Communications between the sensors and the transputer network are almost entirely optical, with special circuits designed at Salford to convert standard sensor outputs into optical signals. Several different systems are used, according to the response time required.

Paper Details

Date Published: 16 August 1994
PDF: 12 pages
Proc. SPIE 2206, High-Power Gas and Solid State Lasers, (16 August 1994); doi: 10.1117/12.184631
Show Author Affiliations
Allan D. Boardman, Univ. of Salford (United Kingdom)
Elizabeth M. Hodgson, Univ. of Salford (United Kingdom)
M. B. Richardson, Univ. of Salford (United Kingdom)
A. J. Spence, Univ. of Salford (United Kingdom)
A. C. Wilson, Univ. of Salford (United Kingdom)


Published in SPIE Proceedings Vol. 2206:
High-Power Gas and Solid State Lasers
Markus Bohrer; Tommaso Letardi; Dieter Schuoecker; Horst Weber, Editor(s)

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