Share Email Print
cover

Proceedings Paper

Advanced laser driver for soft x-ray projection lithography
Author(s): Luis E. Zapata; Raymond J. Beach; C. Brent Dane; Patrick Reichert; John N. Honig; Lloyd A. Hackel
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A diode-pumped Nd:YAG laser for use as a driver for a soft x-ray projection lithography system is described. The laser will output 0.5 to 1 J per pulse with about 5 ns pulse width at up to 1.5 kHz repetition frequency. The design employs microchannel-cooled diode laser arrays for optical pumping, zigzag slab energy storage, and a single frequency oscillator injected regenerative amplifier cavity using phase conjugator beam correction for near diffraction limited beam quality. The design and initial results of this laser's activation experiments are presented.

Paper Details

Date Published: 16 August 1994
PDF: 9 pages
Proc. SPIE 2206, High-Power Gas and Solid State Lasers, (16 August 1994); doi: 10.1117/12.184615
Show Author Affiliations
Luis E. Zapata, Lawrence Livermore National Lab. (United States)
Raymond J. Beach, Lawrence Livermore National Lab. (United States)
C. Brent Dane, Lawrence Livermore National Lab. (United States)
Patrick Reichert, Lawrence Livermore National Lab. (United States)
John N. Honig, Lawrence Livermore National Lab. (United States)
Lloyd A. Hackel, Lawrence Livermore National Lab. (United States)


Published in SPIE Proceedings Vol. 2206:
High-Power Gas and Solid State Lasers

© SPIE. Terms of Use
Back to Top