Proceedings PaperSolid state laser reliability, producibility, and maintenance issues for x-ray lithography applications
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Laser-design and manufacturing considerations encountered in a micro-lithography application for a solid-state laser system are considered. A solid-state laser utilized in the application incorporates a zig-zag slab laser amplifier in a master oscillator/power amplifier staging configuration that can meet specifications for reliability and performance required for the semiconductor manufacturing industry. The laser staging makes extensive use of anamorphic beam-shaping and image-relaying to extract energy from the slab amplifier efficiently. The mechanical design of the laser structure employs multiple angularly multiplexed beams through a single-slab amplifier in order to minimize the total system volume. Relay spatial filters and maintenance issues are reviewed.