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Proceedings Paper

Arrayed lithography using STM-based microcolumns
Author(s): T. H. Philip Chang; Lawrence P. Muray; Urs Staufer; Mark A. McCord; Dieter P. Kern
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Paper Details

Date Published: 3 October 1993
PDF: 32 pages
Proc. SPIE 10310, Technology of Proximal Probe Lithography, 1031009 (3 October 1993); doi: 10.1117/12.183200
Show Author Affiliations
T. H. Philip Chang, IBM T. J. Watson Research Ctr. (United States)
Lawrence P. Muray, Cornell Univ. (United States)
Urs Staufer, Univ. of Basel (Switzerland)
Mark A. McCord, IBM T. J. Watson Research Ctr. (United States)
Dieter P. Kern, IBM T. J. Watson Research Ctr. (Germany)


Published in SPIE Proceedings Vol. 10310:
Technology of Proximal Probe Lithography
Christie R. K. Marrian, Editor(s)

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