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Proceedings Paper

Scanning tunneling microscope-based fabrication and characteerization on passivated semiconductor surfaces
Author(s): John A. Dagata; Jason Schneir
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Paper Details

Date Published: 3 October 1993
PDF: 11 pages
Proc. SPIE 10310, Technology of Proximal Probe Lithography, 1031007 (3 October 1993); doi: 10.1117/12.183198
Show Author Affiliations
John A. Dagata, National Institute of Standards and Technology (United States)
Jason Schneir, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 10310:
Technology of Proximal Probe Lithography
Christie R. K. Marrian, Editor(s)

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