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Proceedings Paper

Low voltage E-beam lithography with the STM
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Paper Details

Date Published: 3 October 1993
PDF: 16 pages
Proc. SPIE 10310, Technology of Proximal Probe Lithography, 1031005 (3 October 1993); doi: 10.1117/12.183196
Show Author Affiliations
Christie R. Marrian, Naval Research Lab. (United States)
Elizabeth A. Dobisz, Naval Research Lab. (United States)
John A. Dagata, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 10310:
Technology of Proximal Probe Lithography
Christie R. K. Marrian, Editor(s)

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