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Proceedings Paper

Principles and techniques of STM lithography
Author(s): Mark A. McCord; Roger Fabian W. Pease
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Paper Details

Date Published: 3 October 1993
PDF: 17 pages
Proc. SPIE 10310, Technology of Proximal Probe Lithography, 1031003 (3 October 1993); doi: 10.1117/12.183194
Show Author Affiliations
Mark A. McCord, IBM Corp. (United States)
Roger Fabian W. Pease, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 10310:
Technology of Proximal Probe Lithography
Christie R. K. Marrian, Editor(s)

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