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Proceedings Paper

Metrology applications of scanning probe microscopes
Author(s): Leigh Ann Files-Sesler; John N. Randall; Francis G. Celii
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Paper Details

Date Published: 3 October 1993
PDF: 24 pages
Proc. SPIE 10310, Technology of Proximal Probe Lithography, 103100J (3 October 1993); doi: 10.1117/12.183193
Show Author Affiliations
Leigh Ann Files-Sesler, Texas Instruments Inc. (United States)
John N. Randall, Texas Instruments Inc. (United States)
Francis G. Celii, Texas Instruments Inc. (United States)


Published in SPIE Proceedings Vol. 10310:
Technology of Proximal Probe Lithography
Christie R. K. Marrian, Editor(s)

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