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Proceedings Paper

Metrology with scanning probe microscopes
Author(s): Joseph E. Griffith; David A. Grigg; G. P. Kochanski; Michael J. Vasile; Phillip E. Russell
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Paper Details

Date Published: 3 October 1993
PDF: 26 pages
Proc. SPIE 10310, Technology of Proximal Probe Lithography, 103100I (3 October 1993); doi: 10.1117/12.183192
Show Author Affiliations
Joseph E. Griffith, AT&T Bell Labs. (United States)
David A. Grigg, Digital Instruments (United States)
G. P. Kochanski, AT&T Bell Labs. (United States)
Michael J. Vasile, AT&T Bell Labs. (United States)
Phillip E. Russell, North Carolina State Univ. (United States)

Published in SPIE Proceedings Vol. 10310:
Technology of Proximal Probe Lithography
Christie R. K. Marrian, Editor(s)

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