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Proceedings Paper

Generating and measuring displacements up to 0.1m to an accuracy of0.1 nm: is it possible?
Author(s): E. Clayton Teague
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Paper Details

Date Published: 3 October 1993
PDF: 42 pages
Proc. SPIE 10310, Technology of Proximal Probe Lithography, 103100H (3 October 1993); doi: 10.1117/12.183191
Show Author Affiliations
E. Clayton Teague, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 10310:
Technology of Proximal Probe Lithography
Christie R. K. Marrian, Editor(s)

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