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Proceedings Paper

Fabrication and characterization using scanned nanoprobes
Author(s): Grover C. Wetsel; Sterling E. McBride; Herschel M. Marchman
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Paper Details

Date Published: 3 October 1993
PDF: 21 pages
Proc. SPIE 10310, Technology of Proximal Probe Lithography, 103100F (3 October 1993); doi: 10.1117/12.183189
Show Author Affiliations
Grover C. Wetsel, Univ. of Texas at Dallas (United States)
Sterling E. McBride, Univ. of Texas at Dallas (United States)
Herschel M. Marchman, Univ. of Texas at Dallas (United States)


Published in SPIE Proceedings Vol. 10310:
Technology of Proximal Probe Lithography
Christie R. K. Marrian, Editor(s)

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