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Proceedings Paper

Atomic force microscopy experimentation at surfaces: hardness, wear and lithographic applications
Author(s): T. A. Jung; A. Moser; Michael T. Gale; H. J. Hug; U. D. Schwarz
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Paper Details

Date Published: 3 October 1993
PDF: 34 pages
Proc. SPIE 10310, Technology of Proximal Probe Lithography, 103100E (3 October 1993); doi: 10.1117/12.183188
Show Author Affiliations
T. A. Jung, Paul Scherrer Institute (Switzerland)
A. Moser, Univ. of Basel (Switzerland)
Michael T. Gale, Paul Scherrer Institute (Switzerland)
H. J. Hug, Univ. of Basel (Switzerland)
U. D. Schwarz, Univ. of Basel (Germany)

Published in SPIE Proceedings Vol. 10310:
Technology of Proximal Probe Lithography
Christie R. K. Marrian, Editor(s)

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