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Proceedings Paper

Technology of proximal probe lithography: an overview
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Paper Details

Date Published: 3 October 1993
PDF: 10 pages
Proc. SPIE 10310, Technology of Proximal Probe Lithography, 1031002 (3 October 1993); doi: 10.1117/12.183184
Show Author Affiliations
John A. Dagata, National Institute of Standards and Technology (United States)
Christie R. Marrian, Naval Research Lab. (United States)


Published in SPIE Proceedings Vol. 10310:
Technology of Proximal Probe Lithography
Christie R. K. Marrian, Editor(s)

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