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Proceedings Paper

Noncontact measuring profile of magnetic disk with optical methods
Author(s): Yang Zhao; Dacheng Li; Mang Cao; Jia Wang
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Paper Abstract

The paper discusses some optical methods of measuring the profile of disk non-contacting. Grazing incident interferometer, Color schieren, and Moire deflectometer. Especially in the paper a new measuring method and instrument is introduced which is a pointwise instrument with an optical probe. It can measure a global and local profile of a disk in tangential and radial direction at the same time, without sacrificing the measurement accuracy. The resolution of the probe is 0.3 nm, the instrument accuracy better than 0.04 micrometers , the dynamic range larger than 5 mm.

Paper Details

Date Published: 5 August 1994
PDF: 3 pages
Proc. SPIE 2321, Second International Conference on Optoelectronic Science and Engineering '94, (5 August 1994); doi: 10.1117/12.182181
Show Author Affiliations
Yang Zhao, Tsinghua Univ. (China)
Dacheng Li, Tsinghua Univ. (China)
Mang Cao, Tsinghua Univ. (China)
Jia Wang, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 2321:
Second International Conference on Optoelectronic Science and Engineering '94
Wang Da-Heng; Anna Consortini; James B. Breckinridge, Editor(s)

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