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Proceedings Paper

Active interferometers for shape and deformation measurements
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Paper Abstract

It is generally difficult to perform interferometric measurements of surface shape or deformation outside optical benches because fringes are blurred by external perturbations such as mechanical vibration or air turbulence. For overcoming this we have developed active interferometers, in which fringes are stabilized by detecting their movement induced by the perturbations and feeding back the signal to a piezoelectric mirror of the interferometer. We also extend the system to an active phase-shifting speckle interferometer by which the correlation fringes are shifted under feedback control for automatic analysis. Examples of deformation measurement under air turbulence are presented.

Paper Details

Date Published: 5 August 1994
PDF: 5 pages
Proc. SPIE 2321, Second International Conference on Optoelectronic Science and Engineering '94, (5 August 1994); doi: 10.1117/12.182149
Show Author Affiliations
Ichirou Yamaguchi, Institute of Physical and Chemical Research/RIKEN (Japan)
Jiyuan Liu, The Institute of Physical and Chemical Research (RIKEN) (Japan)
Jun-ichi Kato, Institute of Physical and Chemical Research/RIKEN (Japan)


Published in SPIE Proceedings Vol. 2321:
Second International Conference on Optoelectronic Science and Engineering '94
Wang Da-Heng; Anna Consortini; James B. Breckinridge, Editor(s)

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