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Proceedings Paper

Study of the fabrication of microlenses by laser chemical vapor deposition
Author(s): Huizhen Yao; Guorui Song; Zhonggang Jiang
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Paper Abstract

In this paper, a method of investigating a produce silicon-nitride microlenses with the thickness profile of spherical shape on flat quartz substrate by laser chemical vapor deposition (Laser CVD) was introduced. The results of tests indicated that the spherical microlenses with smooth surface were fabricated through regulating laser power, illumination time, concentration and mixture ratio of source gases.

Paper Details

Date Published: 5 August 1994
PDF: 3 pages
Proc. SPIE 2321, Second International Conference on Optoelectronic Science and Engineering '94, (5 August 1994); doi: 10.1117/12.182144
Show Author Affiliations
Huizhen Yao, South China Univ. of Technology (China)
Guorui Song, South China Univ. of Technology (China)
Zhonggang Jiang, South China Univ. of Technology (China)


Published in SPIE Proceedings Vol. 2321:
Second International Conference on Optoelectronic Science and Engineering '94
Wang Da-Heng; Anna Consortini; James B. Breckinridge, Editor(s)

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