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Proceedings Paper

Double heterodyne interferometer using a multimode laser diode
Author(s): Sen Han; E. Dalhoff; Edgar W. Fischer; S. Heim; Hans J. Tiziani
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Paper Abstract

A double heterodyne interferometer using a multimode laser diode with a synthetic wavelength of approximately 1 mm has been established and the stability of the synthetic wavelength has been investigated.

Paper Details

Date Published: 5 August 1994
PDF: 4 pages
Proc. SPIE 2321, Second International Conference on Optoelectronic Science and Engineering '94, (5 August 1994); doi: 10.1117/12.182123
Show Author Affiliations
Sen Han, Veeco Metrology (Germany)
E. Dalhoff, Univ. Stuttgart (Germany)
Edgar W. Fischer, Univ. Stuttgart (Germany)
S. Heim, Univ. Stuttgart (Germany)
Hans J. Tiziani, Univ. Stuttgart (Germany)


Published in SPIE Proceedings Vol. 2321:
Second International Conference on Optoelectronic Science and Engineering '94

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