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Proceedings Paper

Technique and application of infrared thermal radiometry in scanning electron microscope
Author(s): Jianping Yin; Zhiming Wu; Shiqun Zhu; Weijian Gao
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Paper Abstract

In this paper, a new technique of scanning electron thermal radiometry (SETR) is proposed. The technique is a combination of microscopic imaging and microarea thermal analysis which are developed from scanning electron microscopy. The characteristics and applications of SETR are discussed.

Paper Details

Date Published: 5 August 1994
PDF: 4 pages
Proc. SPIE 2321, Second International Conference on Optoelectronic Science and Engineering '94, (5 August 1994); doi: 10.1117/12.182116
Show Author Affiliations
Jianping Yin, Suzhou Univ. (China)
Zhiming Wu, Suzhou Univ. (China)
Shiqun Zhu, Suzhou Univ. (China)
Weijian Gao, Suzhou Univ. (China)


Published in SPIE Proceedings Vol. 2321:
Second International Conference on Optoelectronic Science and Engineering '94

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