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Proceedings Paper

Precision laser scribing machine
Author(s): Yongzheng Li; Qiu'e Zhang
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Paper Abstract

In this paper we describe a new high precision laser scribing machine. The platform of this machine is driven by a servo motor controlled with an photoelectric coder and computer. With a predetermined laser beam axis angle (equal to 25 degree(s)) to the normal line of the workpiece's surface, the laser beam axis is always quasi-perpendicular to the surface of the workpiece being scribed. We can obtain scribing line of apparently different thickness by changing the dot density without changing the defocusing. We have also developed a new technique to double the laser pulse repetition rate, etc.

Paper Details

Date Published: 5 August 1994
PDF: 3 pages
Proc. SPIE 2321, Second International Conference on Optoelectronic Science and Engineering '94, (5 August 1994); doi: 10.1117/12.182080
Show Author Affiliations
Yongzheng Li, Changchun Institute of Optics and Fine Mechanics (China)
Qiu'e Zhang, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 2321:
Second International Conference on Optoelectronic Science and Engineering '94
Wang Da-Heng; Anna Consortini; James B. Breckinridge, Editor(s)

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