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Proceedings Paper

New microoptical devices based on micromechanics
Author(s): Rainer Riesenberg; Johann Michael Koehler; Horst Porwol
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Paper Abstract

New micro-optical devices are presented: a modulated thermal IR source and an electrical controllable micromirror for image formation with an adjustable focal length ranging from (infinity) down to 0.001 m. These integrable thermo-optical devices base on micromechanics and thin film technology. Device fabrication, the physical background, properties, advantages, limitations, especially size effects, and experimental examples are given.

Paper Details

Date Published: 28 July 1994
PDF: 7 pages
Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); doi: 10.1117/12.180985
Show Author Affiliations
Rainer Riesenberg, Institut fuer Physikalische Hochtechnologie e.V. (Germany)
Johann Michael Koehler, Institut fuer Physikalische Hochtechnologie e.V. (Germany)
Horst Porwol, Institut fuer Physikalische Hochtechnologie e.V. (Germany)


Published in SPIE Proceedings Vol. 2213:
Nanofabrication Technologies and Device Integration
Wolfgang Karthe, Editor(s)

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