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Proceedings Paper

Quantum well engineering for semiconductor integrated optical sensors
Author(s): Hans P. Zappe; Daniel Hofstetter; Hazel E.G. Arnot
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Paper Abstract

Semiconductor technology, when applied to the design and fabrication of integrated optical sensors, will yield structures of improved performance and reduced cost. Key advances in this area employ two quantum well-based effects, the quantum confined Stark effect and selective quantum well intermixing, the use of which enable the monolithic integration and enhanced functionality of semiconductor-based optical sensor circuits. In this paper, we discuss the application of these effects to the fabrication of semiconductor devices useful for integrated optical sensors based on waveguide interferometry. The quantum confined Stark effect allows us to electrically define the absorption edge of detectors and permits the fabrication of high- efficiency phase modulators. By the use of different surface dielectrics, quantum well intermixing is employed to generate transparent and absorbing regions on a single substrate. Current and future applications are discussed.

Paper Details

Date Published: 28 July 1994
PDF: 12 pages
Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); doi: 10.1117/12.180963
Show Author Affiliations
Hans P. Zappe, Paul Scherrer Institute (Switzerland)
Daniel Hofstetter, Paul Scherrer Institute (Switzerland)
Hazel E.G. Arnot, Paul Scherrer Institute (Switzerland)

Published in SPIE Proceedings Vol. 2213:
Nanofabrication Technologies and Device Integration
Wolfgang Karthe, Editor(s)

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