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Proceedings Paper

Integrated planar Fresnel zone lenses for beam forming and coupling
Author(s): Edgar Pawlowski
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Paper Abstract

A new integrated device for coupling light into waveguides or deflecting and focusing the light from waveguide elements is proposed. The device shows flexible design possibilities and compact dimensions. It consists of a combination of a refractive cylindrical microlens and an integrated planar Fresnel zone lens. High coupling efficiencies can be expected by approaching a kinoform profile with multiphase steps. The Fresnel zone lenses and the cylindrical microlenses were fabricated by thin film deposition of SiOx-multilayers. The measured spot-sizes of the fabricated microlenses are close to the diffraction limited values. A theoretical analysis of coupling tolerances indicates that integrated planar Fresnel zone lens couplers are useful for optical free space interconnects.

Paper Details

Date Published: 28 July 1994
PDF: 9 pages
Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); doi: 10.1117/12.180950
Show Author Affiliations
Edgar Pawlowski, Heinrich-Hertz-Institut fuer Nachrichtentechnik (Germany)

Published in SPIE Proceedings Vol. 2213:
Nanofabrication Technologies and Device Integration
Wolfgang Karthe, Editor(s)

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